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Huawei coordinates China's DUV lithography push
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Huawei is coordinating China's DUV lithography effort, with Yuliangsheng building a machine using Zeiss lenses. SMIC and Huawei test the tool. Huawei's Habo invested in Fujian Zhiqi Photonics and Beijing RSLaser. Chinese lithography lags ASML by roughly two decades.
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